JPS6410947U - - Google Patents
Info
- Publication number
- JPS6410947U JPS6410947U JP10554587U JP10554587U JPS6410947U JP S6410947 U JPS6410947 U JP S6410947U JP 10554587 U JP10554587 U JP 10554587U JP 10554587 U JP10554587 U JP 10554587U JP S6410947 U JPS6410947 U JP S6410947U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- chamber
- valve
- oven
- exhaust system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554587U JPS6410947U (en]) | 1987-07-09 | 1987-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554587U JPS6410947U (en]) | 1987-07-09 | 1987-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410947U true JPS6410947U (en]) | 1989-01-20 |
Family
ID=31338254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10554587U Pending JPS6410947U (en]) | 1987-07-09 | 1987-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410947U (en]) |
-
1987
- 1987-07-09 JP JP10554587U patent/JPS6410947U/ja active Pending